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2012
2011
2011
2006
2006
2006
2006
2006
2006
2006
2006
2006
2006
2006
2006
2006
2005
2005
2005
2005
2005
2004
2004
2003
 Hitachi; Tessera Technologies Inc.
2003
 Hitachi; Tessera, Inc.; Tessera Technologies Inc.
2003
2003
2003
 Hitachi;  Metatec;  Panasonic; Metatec International, Inc.; Metatec Inc.
2002
2002